Multichip Module Technologies:LTCC Substrates and Aluminum Nitride
LTCC Substrates
The use of glass and glass-ceramics in electronic packaging goes back to the invention of semiconductors. Glasses are used for sealing T-O type packages and CERDIPs, as crossover and inter-level dielectrics in hybrid substrates. The success of co-fired alumina substrates spurred the development of the multilayer glass-ceramic substrates. These advantages derive from the higher electrical conductivity lines of copper, silver, or gold; the lower dielectric constant of the glass ceramic; and the closer CTE match of the substrate to silicon.
Two approaches have been used to obtain glass-ceramic compositions suitable for fabricating self- supporting substrates [6–8]. In the first approach, fine powder of a suitable glass-composition is used that has the ability to sinter well in the glassy state and simultaneously crystallize to become a glass- ceramic. More commonly, mixtures of ceramic powders are used, such as alumna and a suitable glass in nearly equal proportions, to obtain densely sintered substrates [9,10]. Because many glass and ceramic powders can be used to obtain densely sintered glass-ceramic, the actual choice is often made on the basis of other desirable attributes in the resulting glass-ceramic—such as low dielectric constant for lowering the signal propagation delay and coefficient of thermal expansion (CTE) closely matched to the CTE of silicon to improve the reliability of solder interconnections. Unlike the case of a crystallizing glass, the mixed glass and ceramic approach allows for a much wider choice of materials.
Aluminum Nitride
Aluminum nitride products are used in a variety of commercial and military applications.
Thermal management with solutions such as AlN can provide superior cooling to ensure reliable system operation. AlN packages typically offer a thermal conductivity of 150 to 200 W/mK, a level which can be compared with many metals or other high thermal conductive materials such as berillia (BeO) or silicon carbide (SiC). AlN has a thermal coefficient of expansion of 4.4 ppm, which is better matched to silicon than to alumina or plastics. Table 9.2 provides a comparison of AlN properties.
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