Embedded Memory:Technology Integration and Applications [3,5].

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Technology Integration and Applications [3,5]

The memory technologies for embedded memories have a wide variation—from ROM to RAM—as listed in Table 53.1 [3]. In choosing these technologies, one of the most important figure of merits is the compatibility to logic process.

1. Embedded ROM: ROM technology has the highest compatibility to logic process. However, its application is rather limited. PLA, or ROM-based logic design, is a well-used but rather special case of embedded ROM category. Other applications are limited to storage for microcode or well- debugged control code. A large size ROM for tables or dictionary applications may be implemented in generic ROM chips with lower bit cost.

2. Embedded EPROM/E2ROM: EPROM/E2PROM technology includes high-voltage devices and/or thin tunneling insulators, which require two to three additional mask steps and processing steps to logic process. Due to its unique functionality, PROM-embedded MPUs [7] are well used. To minimize process overhead, single poly E2PROM cell has been developed [8]. Counterparts to this approach are piggy-back packaged EPROM/MPUs or battery-backed SRAM/MPUs. However, considering process technology innovation, on-chip PROM implementation is winning the game.

3. Embedded SRAM is one of the most frequently used memory embedded in logic chips. Major applications are high-speed on-chip buffers such as TLB, cache, register file, etc. Table 53.2 gives a comparison of some approaches for SRAM integration. A six-transistor cell approach may be the most highly compatible process, unless any special structures used in standard 6-Tr SRAMs are employed. The bit density is not very high. Polysilicon resistor load 4-Tr cells provide higher bit density with the cost of process complexity associated with additional polysilicon-layer resistors. The process complexity and storage density may be compromised to some extent using a single layer of polysilicon. In the case of a polysilicon resistor load SRAM, which may have relaxed specifications with respect to data holding current, the requirement for substrate structure to achieve good soft error immunity is more relaxed as compared to low stand-by generic SRAMs. Therefore, the TFT (thin-film transistor) load cell may not be required for several generations due to its complexity.

Embedded Memory-0598

4. Embedded DRAM (eDRAM) is not as widely used as SRAMs. Its high density features, however, are very attractive. Several different embedded DRAM approaches are listed in Table 53.3. A trench or stacked cell used in commodity DRAMs has the highest density, but the complexity is also high. The cost is seldom attractive when compared to a multi-chip approach using standard DRAM, which is the ultimate in achieving low bit cost. This type of cell is well suited for ASM (application specific memory), which will be described in the next section. A planar cell with multiple (double) polysilicon tructures is also suitable for memory-rich applications [9]. A gate capacitor storage cell approach can be fully compatible to logic process providing relatively high density [10]. The four-Tr cell (4-Tr SRAM cell minus resistive load) provides the same speed and density as SRAM, but full compatibility to logic process and requires refresh operation [11].

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